Selvaraja, SK and Chatterjee, A and Nambiar, S (2022) Integrated Silicon photodetectors in Silicon Nitride-on-SOI platform. In: 2022 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2022, 31 July 2022through 5 August 2022, Sapparo.
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Official URL: https://doi.org/10.1109/CLEO-PR62338.2022.10431981
Abstract
In this talk, we shall discuss the strategies to integrate silicon photodetector in silicon nitride-on-SOI platform. We shall discuss device design, fabrication challenges and measurement results of detectors for potential sensor and high-speed applications. © IEEE 2022.
Item Type: | Conference Paper |
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Publication: | 2022 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2022 - Proceedings |
Publisher: | Institute of Electrical and Electronics Engineers Inc. |
Additional Information: | The copyright for this article belongs to Institute of Electrical and Electronics Engineers Inc. |
Department/Centre: | Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering |
Date Deposited: | 03 Jul 2024 10:06 |
Last Modified: | 03 Jul 2024 10:06 |
URI: | http://eprints.iisc.ac.in/id/eprint/84563 |
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