Integrated Silicon photodetectors in Silicon Nitride-on-SOI platform

Selvaraja, SK and Chatterjee, A and Nambiar, S (2022) Integrated Silicon photodetectors in Silicon Nitride-on-SOI platform. In: 2022 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2022, 31 July 2022through 5 August 2022, Sapparo.

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Abstract

In this talk, we shall discuss the strategies to integrate silicon photodetector in silicon nitride-on-SOI platform. We shall discuss device design, fabrication challenges and measurement results of detectors for potential sensor and high-speed applications. © IEEE 2022.

Item Type:	Conference Paper
Publication:	2022 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2022 - Proceedings
Publisher:	Institute of Electrical and Electronics Engineers Inc.
Additional Information:	The copyright for this article belongs to Institute of Electrical and Electronics Engineers Inc.
Department/Centre:	Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited:	03 Jul 2024 10:06
Last Modified:	03 Jul 2024 10:06
URI:	http://eprints.iisc.ac.in/id/eprint/84563

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