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PZT-based Multi-Mode Cantilever for Viscosity Sensing

Javed, N and Singh, P and Tiwari, S and Jain, P and Sandeep, K and Pratap, R and Pillai, G (2023) PZT-based Multi-Mode Cantilever for Viscosity Sensing. In: 2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, 15 - 19 May 2023, Hybrid, Toyama.

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Official URL: https://doi.org/10.1109/EFTF/IFCS57587.2023.102721...


We report a thin film Lead Zirconate Titanate (PZT) on Silicon-on-Insulator (SOI) based microcantilever for fluid dynamic viscosity (ηfluid) sensing using optical and electrical characterization schemes. The viscosity of the medium is modulated by adding glycerol to deionized (DI) water. The measurements are carried over a viscosity range of 0.98-24.24 cP, which covers the operational range for biomedical applications. The fundamental cantilever mode yields a quality factor (Q) of 630 and 15 in air and DI water, respectively, whilst the second mode exhibits a Q of 840 and 30 in air and DI water, respectively. Sensor characterization using Laser Doppler Vibrometer (LDV) shows a power law relation between Q and ηfluid (Q = aηfluidb). A high relative responsivity of 0.38 and 0.41 with respect to ηfluid is observed for the first and second flexural modes of the microcantilever, respectively. These results indicate the development of a good platform for on-chip viscosity measurements for biomedical and industrial applications. © 2023 IEEE.

Item Type: Conference Proceedings
Publication: Proceedings - 2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2023
Publisher: Institute of Electrical and Electronics Engineers Inc.
Additional Information: The copyright for this article belongs to Authors
Keywords: Deionized water; Ferroelectric ceramics; Laser Doppler velocimeters; Lead zirconate titanate; Medical applications; MEMS; Nanocantilevers; Viscosity measurement, Air-water; Deionised waters; Lead zirconate titanate; Lead zirconate-titanate; Micro-cantilevers; Mode; Multimodes; PZT; Silicon on insulator; Thin film LED, Viscosity
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 04 Mar 2024 09:40
Last Modified: 04 Mar 2024 09:40
URI: https://eprints.iisc.ac.in/id/eprint/84378

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