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Mixed Nonlinear Response and Transition of Nonlinearity in a Piezoelectric Membrane

Arora, N and Singh, P and Kumar, R and Pratap, R and Naik, A (2023) Mixed Nonlinear Response and Transition of Nonlinearity in a Piezoelectric Membrane. In: ACS Applied Electronic Materials .

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Official URL: https://doi.org/10.1021/acsaelm.3c00735


Nonlinearities play a critical role in the dynamics of mechanical resonators, enhancing sensitivity and enabling signal manipulation. Understanding the parameters affecting nonlinearities is crucial for developing strategies to counteract their effects or manipulate them for improved device performance. This study investigates the impact of fabrication-induced curvature on the dynamics of zinc-oxide-based piezoelectric micromachined ultrasonic transducers (PMUTs). Our experiments reveal that these devices exhibit hardening, softening, and mixed nonlinear responses with varying initial static displacements. Notably, PMUTs with an almost flat initial static displacement exhibit hardening nonlinearity, while those with a curved initial static displacement show softening nonlinearity. An exotic mixed nonlinear response is observed for intermediate static displacement. We attribute the observed nonlinear response to the interplay between static displacement induced quadratic nonlinearity and midplane-stretching induced cubic nonlinearity. We provide a theoretical formulation for the dynamics of the devices, which explains the experimental results and highlights the nonlinear responses and their dependence on the initial static displacement. Our findings underscore the significance of nonlinearities in the dynamics of mechanical resonators and suggest ways to optimize the device performance. © 2024 American Chemical Society.

Item Type: Journal Article
Publication: ACS Applied Electronic Materials
Publisher: American Chemical Society
Additional Information: The copyright for this article belongs to author
Keywords: Dynamics; Hardening; II-VI semiconductors; Piezoelectricity; Resonators; Ultrasonic transducers, Device performance; Mechanical resonators; Micro-machined ultrasonic transducer; Mixed nonlinear response; Non-linear response; Nonlinearity; Piezoelectric; Piezoelectric micromachined ultrasonic transducer; Static displacement; Zinc oxide, Zinc oxide
Department/Centre: Others
Date Deposited: 01 Mar 2024 10:32
Last Modified: 01 Mar 2024 10:32
URI: https://eprints.iisc.ac.in/id/eprint/84066

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