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Guided Wave Optical MEMS Pressure Sensor

Pattnaik, Prasant Kumar and Selvarajan, A and Srinivas, T (2005) Guided Wave Optical MEMS Pressure Sensor. In: SICon/05-Sensors for Industry Conference, 8-10 February, Houston,Texas,USA, pp. 122-125.


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Guided wave Optics in combination with micro-machining technology offer immense potential for sensor appliations. In this paper we analyse an guided wave optics based MEMS pressure sensor consisting of a Mach-Zehnder interferomter whose sensing arm is over the edge of a bulk micromachined silicon diaphragm. We compare this sensor utilising the elasto-ptic effect with the conventional piezo-resistive and capactive miromachined pressure sensors in terms of their sensitivities. This MOEM pressure sensor is found to be superior to the convenional ones. This sensor can be used for blood pressure monitorng, precision instrumentation, aerospace propulsion application with suitable design parameters.

Item Type: Conference Paper
Department/Centre: Division of Electrical Sciences > Electrical Communication Engineering
Date Deposited: 10 Aug 2006
Last Modified: 19 Sep 2010 04:31
URI: http://eprints.iisc.ac.in/id/eprint/8270

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