Structure and microstructure of ion-plated titanium films

Gunasekhar, KR and Srinivasulu, S and Swarnalatha, M and Krishna, Ghanashyam M and Mohan, S (1994) Structure and microstructure of ion-plated titanium films. In: Thin Solid Films, 252 (1). pp. 7-12.

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Abstract

In the present study the properties of ion-plated titanium films have been investigated for their structure and microstructure. It has been found that the crystalline orientation of the films is a strong function of process parameters such as the rate of deposition, ion flux and bias voltage. The stress exhibits a transition from tensile to compressive with increase in ion bombardment. It has also been found that the lattice parameter increases initially and then decreases with increase in ion bombardment. Finally, the microstructure of the films shows that they densify with increase in ion bombardment. A correlation between the mechanisms governing the process and the film properties has also been made.

Item Type:	Journal Article
Publication:	Thin Solid Films
Publisher:	Elsevier
Additional Information:	Copyright of this article belongs to Elsevier.
Keywords:	Structural properties;Titanium
Department/Centre:	Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited:	07 Oct 2006
Last Modified:	19 Sep 2010 04:30
URI:	http://eprints.iisc.ac.in/id/eprint/8224

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