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Silicon Nitride Microcantilever-Based Temperature Sensors

Verma, HK and Khan, D and Kandpal, M and Behra, SN and Singh, J and Naik, A (2023) Silicon Nitride Microcantilever-Based Temperature Sensors. In: 2023 IEEE Applied Sensing Conference, APSCON 2023, 23 - 25 January 2023, Bengaluru.

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Official URL: https://doi.org/10.1109/APSCON56343.2023.10101115


This paper presents the design, fabrication and characterization of self-sensing microcantilevers with integrated actuation and detection techniques for temperature sensing applications. We demonstrate the on-chip electrostatic actuation and metal piezoresistive transduction. These microcantilevers are very sensitive to temperature changes during the dynamic mode operation. We use the changes in resonance frequency of the resonator with temperature due to the change in strain of silicon nitride cantilevers for ultrasensitive temperature sensing. We also estimate the frequency stability of our devices using Allan deviation. Based on this measurement, we calculated the temperature sensitivity and demonstrate an order of improvement in the temperature sensitivity compared to NEMS counterpart.

Item Type: Conference Paper
Publication: APSCON 2023 - IEEE Applied Sensing Conference, Symposium Proceedings
Publisher: Institute of Electrical and Electronics Engineers Inc.
Additional Information: The copyright for this article belongs to Institute of Electrical and Electronics Engineers Inc.
Keywords: Chemical sensors; Frequency stability; MEMS; Nanocantilevers; Temperature sensors, Allan deviation; Electrostatic actuation; Fabrication and characterizations; Micro-cantilevers; On chips; Self-sensing; Sensing applications; Silicon nitride cantilever; Temperature sensing; Temperature sensitivity, Silicon nitride
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 15 Jun 2023 08:47
Last Modified: 15 Jun 2023 08:47
URI: https://eprints.iisc.ac.in/id/eprint/81995

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