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Non-Linearity Switching in PMUTs for Enhanced Sensitivity

Paladugu, SH and Singh, P and Rangarajan, A and Pratap, R (2023) Non-Linearity Switching in PMUTs for Enhanced Sensitivity. In: 2023 IEEE Applied Sensing Conference, APSCON 2023, 23 - 25 January 2023, Bengaluru.

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Official URL: https://doi.org/10.1109/APSCON56343.2023.10101190


MEMS resonators when submerged in liquids undergo severe damping resulting in low Q-factors and significantly reduced amplitudes compared to that in air. This dissipation of energy limits the usage of MEMS devices in applications involving fluids such as biological sensing. This paper reports a novel phenomenon of nonlinearity switching from hardening to softening in 2D micro resonators. The transition of nonlinearity passes through a linear zone providing the perfect opportunity to drive the devices at higher voltages to obtain better sensitivities. We studied the response of the 2D MEMS resonator interacting with liquids using experimental techniques and mathematical modelling. The switching response was observed at relatively lower actuation voltages (as low as 0.1 V) in circular PMUTs (Piezoelectric Micromachined Ultrasound Transducers) of 4 mm diameter and in-air resonant frequency of21.5 kHz. While the switching phenomenon can be used to increase the bandwidth of device operation, the linear response zone in the middle provides a higher sensitivity operation of the device.

Item Type: Conference Paper
Publication: APSCON 2023 - IEEE Applied Sensing Conference, Symposium Proceedings
Publisher: Institute of Electrical and Electronics Engineers Inc.
Additional Information: The copyright for this article belongs to Institute of Electrical and Electronics Engineers Inc.
Keywords: MEMS; Microelectromechanical devices; Natural frequencies; Q factor measurement; Resonators; Ultrasonic transducers, Enhanced sensitivity; Linear zone; MEMS resonators; Micromachined ultrasound transducers; Non-linearity; Piezoelectric; Piezoelectric micromachined ultrasound transducer; Sensing; Sensitivity; Softening, Hardening
Department/Centre: Division of Biological Sciences > Molecular Reproduction, Development & Genetics
Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 15 Jun 2023 08:42
Last Modified: 15 Jun 2023 08:42
URI: https://eprints.iisc.ac.in/id/eprint/81991

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