Effect of Rapid Thermal Annealing on Material, Electrical, and Sensing Characteristics of Ag-Doped CaTiO3-CuO Thin Film Carbon-Dioxide Gas Sensors

Rudraswamy, SB and Shwetha, HR and Bhat, N (2023) Effect of Rapid Thermal Annealing on Material, Electrical, and Sensing Characteristics of Ag-Doped CaTiO3-CuO Thin Film Carbon-Dioxide Gas Sensors. In: APSCON 2023 - IEEE Applied Sensing Conference, Symposium Proceedings .

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Abstract

This work investigates the influence of rapid thermal annealing (RTA) on the CO2 sensing properties of RF-sputtered Ag-doped CaTiO3-CuO thin films. After the post-deposition, RTA at various temperatures between 400°C to 600 °C at various time span from 0s to 60 s, the surface morphology, grain size, surface chemical states, I-V properties, and sensing capability of the films have been characterized. The crystallinity was enhanced, and the grain size increased with the increase in annealing temperature. In fact, XRD showed that RTA caused the films to have a strong crystallographic orientation. XPS analysis revealed that there will be no alteration in the oxidation states and chemical composition of the sensing film. The current-voltage characteristics illustrate the relationship between the temperature v/s resistance of the film. From the I-V measurements, it can be observed that an increase in the RTA temperature decreases the resistance of the sensing film. The maximum sensor response of 54 is seen in films when it is annealed at 500 °C for the 60 s, resulting in grain sizes of roughly 10 nm.

Item Type:	Journal Article
Publication:	APSCON 2023 - IEEE Applied Sensing Conference, Symposium Proceedings
Publisher:	Institute of Electrical and Electronics Engineers Inc.
Additional Information:	The copyright for this article belongs to Institute of Electrical and Electronics Engineers Inc.
Keywords:	Carbon dioxide; Chemical sensors; Copper oxides; Crystallinity; Current voltage characteristics; Gas detectors; Grain size and shape; Perovskite; Rapid thermal annealing; Silver compounds; Surface morphology; Thin films, Ag doped; Annealing temperatures; CO gas; CuO thin films; Electrical characteristic; Gas-sensors; Grainsize; Material characteristics; Semiconductor metal oxides; Sensing films, Morphology
Department/Centre:	Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited:	15 Jun 2023 08:40
Last Modified:	15 Jun 2023 08:40
URI:	https://eprints.iisc.ac.in/id/eprint/81990

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