Structural and mechanical properties of Si-doped CrN coatings deposited by magnetron sputtering technique

Vyas, A and Aliyu, A (2023) Structural and mechanical properties of Si-doped CrN coatings deposited by magnetron sputtering technique. In: Heliyon, 9 (2).

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Abstract

This study successfully deposited Si-doped CrN coatings onto Si (100) substrate by direct current magnetron sputtering. The concentration of Si in the CrSiN coatings was varied by changing the Si target current during deposition. The microstructural and mechanical properties were determined by employing X-ray diffraction, X-ray photoelectron spectroscopy, atomic force microscopy, and nanoindentation test. According to the results, the coating with 3.3 at. Si contents (CrSiN-2) show an increase and decrease in the crystallite size and coating surface roughness, respectively, leading to solid solution hardening with an optimum hardness and elastic modulus of 21.37 GPa and 205.68 GPa, respectively. With continued Si addition, the coating roughness increased and the mechanical properties gradually decreased and attained 184.08 GPa and 18.95 GPa for the elastic modulus and hardness of the coating with a maximum Si concentration of 9.2 at. (CrSiN-5). © 2023

Item Type:	Journal Article
Publication:	Heliyon
Publisher:	Elsevier Ltd
Additional Information:	The copyright for this article belongs to Elsevier Ltd.
Keywords:	CrN coatings; CrSiN coating; Magnetron sputtering; Mechanical properties; Microstructure; Si (100) substrate
Department/Centre:	Division of Mechanical Sciences > Materials Engineering (formerly Metallurgy)
Date Deposited:	21 Feb 2023 03:33
Last Modified:	21 Feb 2023 03:33
URI:	https://eprints.iisc.ac.in/id/eprint/80549

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