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Towards the development of backing layer for piezoelectric micromachined ultrasound transducers

Roy, K and Ashok, A and Kalyan, K and Shastri, V and Jeyaseelan, A and Pandi N, V and Nayak, MM and Pratap, R (2021) Towards the development of backing layer for piezoelectric micromachined ultrasound transducers. In: Photons Plus Ultrasound: Imaging and Sensing 2021, 6 - 11 March 2021, Virtual, Online.

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Official URL: https://doi.org/10.1117/12.2582504


In this work, we demonstrate the use of parylene C to reduce the ring down time and enhance the fractional bandwidth of a piezoelectric micromachined ultrasound transducer (PMUT). We further study the effect of increase in thickness of parylene C on the vibration response of a PMUT such as the fundamental resonant frequency and the maximum static deflection. It is found that the increase in the thickness of the deposited parylene C film, decreases the quality factor of a PMUT, following a linear trend, with negligible effect on its fundamental resonant frequency. This can be considered to be an important finding as far as the field of ultrasound imaging is concerned, since this technique paves the way to control the axial resolution of the B-mode ultrasound scan by simply tuning a PMUT's quality factor. © COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.

Item Type: Conference Paper
Publication: Progress in Biomedical Optics and Imaging - Proceedings of SPIE
Publisher: SPIE
Additional Information: The copyright for this article belongs to SPIE.
Keywords: Bandwidth; Natural frequencies; Photons; Piezoelectricity; Transducers; Ultrasonic imaging; Ultrasonic scattering; Ultrasonic transducers, Axial resolutions; Fractional bandwidths; Fundamental resonant frequencies; Micromachined ultrasound transducers; Static deflections; Ultrasound imaging; Ultrasound scans; Vibration response, Piezoelectric transducers
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 22 Feb 2023 04:27
Last Modified: 22 Feb 2023 04:27
URI: https://eprints.iisc.ac.in/id/eprint/80489

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