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Chemiresistors and Their Microfabrication

Baloria, V and Prajapati, CS and Bhat, N and Gupta, G (2020) Chemiresistors and Their Microfabrication. [Book Chapter]

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Official URL: https://doi.org/10.1007/978-981-15-4810-9_3


Rapid industrialization during past few decades has resulted in the emission of gases that pollute environment and pose risk to humanity. Therefore, there is a major concern for protection of the environment, in particular the air we breathe in. People, especially in urban areas, are exposed to a high quantity of toxic and harmful gases such as Cl2, NO2, NO, CO, CO2, NH3, H2S, and SO2. Thus, there is a huge demand for monitoring these hazardous gases, and hence, the need of gas sensors. Based on their detection principle, gas sensors can be classified among various types such as electrical, optical, and mass sensitive. Among the electrical ones, chemiresistive gas sensors (CGS) are widely investigated Thus, this chapter initially introduces CGS, their working and basic characteristics. The power consumption in CGS is generally high owing to their operation at higher temperatures and there have been continuous efforts to minimize it by microfabricating such sensors. Microfabrication results in low power consumption, rapid sensor heating to attain the desired operating temperature owing to lower thermal mass and fast response time of microheater. In addition, mass production owing to batch processing results in cost reduction. Therefore, in the middle part of the chapter various steps involved in microfabrication process along with the evolution of the microfabricated sensor device are outlined. Finally, in the last part, microheater characterization and H2S sensing characteristics of such microfabricated CGS along with a summary and future perspective of microfabrication in gas sensors are described. © 2020, Springer Nature Singapore Pte Ltd.

Item Type: Book Chapter
Publication: Materials Horizons: From Nature to Nanomaterials
Publisher: Springer Nature
Additional Information: The copyright for this article belongs to Springer Nature.
Keywords: Chemiresistors; Gas sensors; MEMS; Microfabrication; Microheaters
Department/Centre: Division of Electrical Sciences > Electrical Communication Engineering
Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 31 Jan 2023 10:13
Last Modified: 31 Jan 2023 10:13
URI: https://eprints.iisc.ac.in/id/eprint/79606

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