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A Photoacoustic Imaging Device Using Piezoelectric Micromachined Ultrasound Transducers (PMUTs)

Dangi, A and Cheng, CY and Agrawal, S and Tiwari, S and Datta, GR and Benoit, RR and Pratap, R and Trolier-Mckinstry, S and Kothapalli, S-R (2020) A Photoacoustic Imaging Device Using Piezoelectric Micromachined Ultrasound Transducers (PMUTs). In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 67 (4). pp. 801-809.

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Official URL: https://doi.org/10.1109/TUFFC.2019.2956463


A linear piezoelectric micromachined ultrasound transducer (PMUT) array was fabricated and integrated into a device for photoacoustic imaging (PAI) of tissue phantoms. The PMUT contained 65 array elements, with each element having 60 diaphragms of 60μm diameter and 75μm pitch. A lead zirconate titanate (PZT) thin film was used as the piezoelectric layer. The in-air vibration response of the PMUT array elements showed a first mode resonance between 6 and 8 MHz. Hydrophone measurements showed 16.2 kPa average peak ultrasound pressure output at 7.5 mm from one element excited with 5 Vpp input. A receive sensitivity of ∼0.48 mV/kPa was observed for a PMUT array element with 0 dB gain. The PMUT array was bonded to a custom-printed circuit board to enable compact integration with an optical fiber bundle for PAI. A broad photoacoustic bandwidth of ~89% was observed for the photoacoustic response captured from absorbing pencil lead targets. Linear scanning of a single element of a PMUT array was performed on different tissue phantoms embedded with light-absorbing targets to successfully demonstrate B-mode PAI using PMUTs. © 1986-2012 IEEE.

Item Type: Journal Article
Publication: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Publisher: Institute of Electrical and Electronics Engineers Inc.
Additional Information: The copyright for this article belongs to the Authors.
Keywords: Electromechanical devices; Lead zirconate titanate; MEMS; Optical fiber fabrication; Optical fibers; Phantoms; Photoacoustic effect; Piezoelectricity; Printed circuit boards; Tissue; Transducers; Ultrasonic imaging; Ultrasonic scattering; Ultrasonic transducers, Lead zirconate titanate thin films; Micromachined ultrasound transducers; Optical fiber bundle; Photo-acoustic imaging; Piezoelectric layers; Ultrasound imaging; Ultrasound pressure; Vibration response, Piezoelectric transducers, devices; echography; equipment design; imaging phantom; microelectromechanical system; microtechnology; photoacoustics; transducer, Equipment Design; Micro-Electrical-Mechanical Systems; Microtechnology; Phantoms, Imaging; Photoacoustic Techniques; Transducers; Ultrasonography
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 24 Jan 2023 05:14
Last Modified: 24 Jan 2023 05:14
URI: https://eprints.iisc.ac.in/id/eprint/79384

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