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Multi-layered Au/Si3N4/SiO2 thermal actuator realization using metal passivated TMAH micro-machining

Maharshi, V and Mere, V and Agarwal, A (2019) Multi-layered Au/Si3N4/SiO2 thermal actuator realization using metal passivated TMAH micro-machining. In: Engineering Research Express, 1 (1).

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Official URL: https://doi.org/10.1088/2631-8695/ab2659


This paper presents the design and fabrication of thermally actuated multi-layered microactuator for out of plane actuation application. Multi-layered actuators are fabricated using ammonium persulfate basedTMAH(Tetra-Methyl-Ammonium-Hydroxide) etching with metal passivation. Multi-layered Au/Si3N4/SiO2 microactuators with straight and cross-heaters are characterized using the I-V measurement tool. Temperature across actuator was similar to simulated results. Gold as an upper layer of a microactuator fully protected during the release process. Fundamental mode or resonant frequency of fabricated multi-layered microactuator measured by laser Doppler vibrometer (LDV) which observed around 20 KHz. ©2019 IOP Publishing Ltd.

Item Type: Journal Article
Publication: Engineering Research Express
Publisher: IOP Publishing Ltd
Additional Information: The copyright for this article belongs to IOP Publishing Ltd
Keywords: Ammonium hydroxide; Ammonium persulfate; Etching; Laser Doppler velocimeters; Microactuators; Natural frequencies, Fully protected; Fundamental modes; I-V measurements; Laser Doppler vibrometers; Out-of-plane actuation; Simulated results; Tetramethyl ammonium hydroxide; Thermal actuator, Micromachining
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 06 Jan 2023 06:18
Last Modified: 06 Jan 2023 06:18
URI: https://eprints.iisc.ac.in/id/eprint/78807

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