Method to fabricate taper waveguide using fixed-beam moving stage electron-beam lithography

Mere, V and Selvaraja, SK (2019) Method to fabricate taper waveguide using fixed-beam moving stage electron-beam lithography. In: Journal of Micro/ Nanolithography, MEMS, and MOEMS, 18 (4).

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Abstract

A method of tapering waveguides using fixed-electronic-beam-moving-stage (FBMS) paths is presented. The tapering is achieved by joining two FBMS paths to a common point. Compared to conventional area and FBMS tapering methods, the proposed method offers smooth and alignment-error-free tapering between waveguides of different widths. We experimentally demonstrate a fully functional FBMS patterned photonic circuit with a power splitter, wire-to-slot coupler, slot waveguide, and a slotted ring resonator. The device response with an insertion loss of-1.35 dB is measured around 1550-nm wavelength. © 2019 Society of Photo-Optical Instrumentation Engineers (SPIE).

Item Type:	Journal Article
Publication:	Journal of Micro/ Nanolithography, MEMS, and MOEMS
Publisher:	SPIE
Additional Information:	The copyright for this article belongs to SPIE.
Keywords:	Electron beam lithography; Resonators; Waveguide couplers, e-Beam lithography; Moving stages; Photonic integrated circuits; Power splitters; Slot waveguide; taper, Optical waveguides
Department/Centre:	Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited:	05 Jan 2023 07:33
Last Modified:	05 Jan 2023 07:33
URI:	https://eprints.iisc.ac.in/id/eprint/78776

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