On the realization of self-sensing piezoelectric MEMS actuators

Tiwari, S and Kumar, R and Menon, PK and Antony, JA and Dutta, S and Pratap, R (2019) On the realization of self-sensing piezoelectric MEMS actuators. In: 4th International Conference on Manipulation, Automation, and Robotics at Small Scales, MARSS 2019, 1 July 2019 - 5 July 2019, Helsinki.

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Abstract

Abstract Three different configurations of self-sensing piezoelectric MEMS actuators are designed, fabricated, and tested with PZT as the active material. A two-port circular diaphragm resonator of radius 1000 μm, a cantilever of length 1000 μm and width-24 μm with two parallel top electrodes, and a four-legged resonator structure with a proof mass of total die size 1.6 mm × 3 mm are fabricated and characterized as self-sensing actuators without any cross-talk compensation. A comparison among the output signals reveals that the cantilever (without etching the PZT in between the two electrodes) and the four-legged resonator perform well as self-sensing actuators, while the two-port diaphragm resonator with large concentric top electrodes suffers from electrical cross-talk. A successful characterization of a self-sensing actuator with the common ground electrode (for cantilever) is being reported for the first time. Deflection values of as low as 1 nm could be easily resolved using the proof-mass resonator. The act of actuation is verified by directly measuring the motion with laser doppler vibrometry which cross-verifies the sensor signal produced by the piezoelectric layer.

Item Type:	Conference Paper
Publication:	Proceedings of MARSS 2019: 4th International Conference on Manipulation, Automation, and Robotics at Small Scales
Publisher:	Institute of Electrical and Electronics Engineers Inc.
Additional Information:	The copyright for this article belongs to Institute of Electrical and Electronics Engineers Inc.
Keywords:	Crosstalk; Diaphragms; Electrodes; Etching; Laser Doppler velocimeters; Microactuators; Nanocantilevers; Piezoelectricity; Resonators; Robotics, Active material; Circular diaphragms; Laser Doppler Vibrometry; Piezoelectric layers; Piezoelectric MEMS; Resonator structures; Self-sensing actuators; Two-port resonator, Piezoelectric actuators
Department/Centre:	Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited:	19 Dec 2022 06:43
Last Modified:	19 Dec 2022 06:43
URI:	https://eprints.iisc.ac.in/id/eprint/78495

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