On the applicability of Sato's equation to capacitative radio frequency sheaths

Balakrishnan, J and Nagabhushana, GR (2000) On the applicability of Sato's equation to capacitative radio frequency sheaths. In: Journal of Physics D: Applied Physics, 33 (24). L153-L157.

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Abstract

We show that the time-dependent version of Sato’s equation, when applied to capacitative radio frequency sheaths, is no longer independent of the electric field of the space charge, and we discuss the use of the equation for a specific sheath model.

Item Type:	Journal Article
Publication:	Journal of Physics D: Applied Physics
Publisher:	Institute of Physics
Additional Information:	Copyright of this article belongs to Institute of Physics.
Department/Centre:	Division of Electrical Sciences > High Voltage Engineering (merged with EE)
Date Deposited:	10 Jul 2006
Last Modified:	19 Sep 2010 04:29
URI:	http://eprints.iisc.ac.in/id/eprint/7844

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