Plasma Oxidized Suspended Core-Shell Nanostructures for High Performance Metal Oxide Gas sensors

Benedict, S and Bhat, N (2019) Plasma Oxidized Suspended Core-Shell Nanostructures for High Performance Metal Oxide Gas sensors. In: 2019 Electron Devices Technology and Manufacturing Conference, 12 March 2019-15 March 2019, Singapore, pp. 157-159.

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Abstract

We report on the novel technique of creating core-shell metal-metal oxide high performance gas sensors using plasma oxidation of a suspended metal thin film. We demonstrate that this technique is very generic by realizing Pt-PtOx and W-WOx nanostructured sensors. The optimization technique for plasma oxidation is elucidated. We also propose an improvisation technique to create nano discs on top of suspended core-shell metal-metal oxide sensor to further enhance the performance. © 2019 IEEE.

Item Type:	Conference Paper
Publication:	2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019
Publisher:	Institute of Electrical and Electronics Engineers Inc.
Additional Information:	The copyright for this article belongs to Institute of Electrical and Electronics Engineers Inc.
Keywords:	Chemical sensors; Electron devices; Gas detectors; Manufacture; Nanostructures; Oxidation; Platinum compounds; Shells (structures); Tungsten compounds, Core shell nano structures; Metal oxide gas sensors; Metal oxide sensors; Metal oxides; Nanostructured sensors; Novel techniques; Optimization techniques; Plasma oxidation, Metals
Department/Centre:	Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited:	13 Dec 2022 04:26
Last Modified:	13 Dec 2022 04:26
URI:	https://eprints.iisc.ac.in/id/eprint/78309

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