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Fabrication of 2d nems on flexible substrates for strain engineering in sensing applications

More, S and Naik, A (2019) Fabrication of 2d nems on flexible substrates for strain engineering in sensing applications. In: 19th International Workshop on Physics of Semiconductor Devices, IWPSD 2017, 11 December 2017through 15 December 2017, New Delhi, pp. 45-48.

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Official URL: https://doi.org/10.1007/978-3-319-97604-4_8


Extraordinary mechanical properties and ultralow mass of 2D materials make them attractive candidates for Nanoelectromechanical Systems (NEMS). Dynamics of ultrathin NEMS strongly depends on strain in the membrane. Control over strain can be utilized to enhance the performance of such 2D NEMS devices (Wang and Feng in Appl Phys Lett 104:103109, 2014 1). Here we report two distinct strategies for fabrication of 2D NEMS on flexible substrate. The process flow is simple and does not deviate drastically from conventional lithographic processes employed for NEMS fabrication. NEMS on flexible substrate can be subjected to desired strain values by bending the substrate.

Item Type: Conference Paper
Publication: Springer Proceedings in Physics
Publisher: Springer Science and Business Media, LLC
Additional Information: The copyright for this article belongs to Springer Science and Business Media, LLC.
Keywords: Fabrication; Mechanical properties; NEMS; Semiconductor devices, Flexible substrate; Lithographic process; Nano electromechanical systems; NEMS devices; Process flows; Sensing applications; Strain engineering; Strain values, Substrates
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 23 Nov 2022 05:15
Last Modified: 23 Nov 2022 05:15
URI: https://eprints.iisc.ac.in/id/eprint/77977

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