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On-chip silicon-photonics based integrated vibrometer

Mere, V and Dash, A and Kallega, R and Naik, A and Pratap, R and Selvaraja, SK (2019) On-chip silicon-photonics based integrated vibrometer. In: MOEMS and Miniaturized Systems XVIII 2019, 2 - 4 February 2019, San Francisco.

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Official URL: https://doi.org/10.1117/12.2509203


In this paper, we demonstrate a compact Silicon photonics-based on-chip integrated interference vibrometer. Unlike conventional readout methods, the demonstrated system is alignment-free and offers multiplex sensing. The intensity that is modulated by the cantilever motion by a photodetector. We present the static and dynamic response of the cantilever by electrostatic excitation validated using ac commercial Laser-Doppler-Vibrometer. We also present a detailed simulation, optimisation and sensitivity analysis of the proposed on-chip vibrometer. Furthermore, the tunability of the sensor to achieve maximum sensitivity is demonstrated.

Item Type: Conference Paper
Publication: Proceedings of SPIE - The International Society for Optical Engineering
Publisher: SPIE
Additional Information: The copyright for this article belongs to SPIE.
Keywords: Laser excitation; MOEMS; Nanocantilevers; Optical sensors; Optical waveguides; Photonic devices; Sensitivity analysis, Cantilever motion; Electrostatic excitation; Grating; Laser Doppler vibrometers; Maximum sensitivity; Mems cantilevers; Static and dynamic response; Vibrometers, Silicon photonics
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 04 Dec 2022 05:04
Last Modified: 04 Dec 2022 05:04
URI: https://eprints.iisc.ac.in/id/eprint/77932

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