Mere, V and Dash, A and Kallega, R and Naik, A and Pratap, R and Selvaraja, SK (2019) On-chip silicon-photonics based integrated vibrometer. In: MOEMS and Miniaturized Systems XVIII 2019, 2 - 4 February 2019, San Francisco.
Full text not available from this repository.Abstract
In this paper, we demonstrate a compact Silicon photonics-based on-chip integrated interference vibrometer. Unlike conventional readout methods, the demonstrated system is alignment-free and offers multiplex sensing. The intensity that is modulated by the cantilever motion by a photodetector. We present the static and dynamic response of the cantilever by electrostatic excitation validated using ac commercial Laser-Doppler-Vibrometer. We also present a detailed simulation, optimisation and sensitivity analysis of the proposed on-chip vibrometer. Furthermore, the tunability of the sensor to achieve maximum sensitivity is demonstrated.
| Item Type: | Conference Paper |
|---|---|
| Publication: | Proceedings of SPIE - The International Society for Optical Engineering |
| Publisher: | SPIE |
| Additional Information: | The copyright for this article belongs to SPIE. |
| Keywords: | Laser excitation; MOEMS; Nanocantilevers; Optical sensors; Optical waveguides; Photonic devices; Sensitivity analysis, Cantilever motion; Electrostatic excitation; Grating; Laser Doppler vibrometers; Maximum sensitivity; Mems cantilevers; Static and dynamic response; Vibrometers, Silicon photonics |
| Department/Centre: | Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering |
| Date Deposited: | 04 Dec 2022 05:04 |
| Last Modified: | 04 Dec 2022 05:04 |
| URI: | https://eprints.iisc.ac.in/id/eprint/77932 |
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