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Design and Analysis of a Miniaturized Atomic Force Microscope Scan Head

Arya, BN and Jayanth, GR (2023) Design and Analysis of a Miniaturized Atomic Force Microscope Scan Head. In: 5th International and 20th National Conference on Machines and Mechanisms, iNaCoMM 2021, 9 December 2021 - 11 December 2021, Jabalpur, pp. 153-166.

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Official URL: https://doi.org/10.1007/978-981-19-3716-3_12


The Atomic Force Microscope (AFM) finds widespread applications as a tool for nano-scale characterization studies and atomic manipulation.Here, we propose the design of a miniaturized AFM scan head for 3-axis nano-positioning.The scan head uses parallelogram-based flexures for amplifying displacements in-plane and a bridge-type displacement amplifier for out-of-plane positioning and achieves a displacement range of ±5 μm along X-, Y- and Z-axes.Subsequently, a lumped parameter model has been obtained for analysing the quasi-static and dynamic characteristics of the different subsystems of the positioner.A comparison of the analytical expressions for the displacement gain and eigen frequencies with Finite Element (FE) analysis revealed match to within 4.The bandwidth along Z-axis is about 5 kHz, which is much larger than that of a conventional AFM scan head.Finally, a feedback control system has been designed to achieve position control using model inversion.

Item Type: Conference Paper
Publication: Lecture Notes in Mechanical Engineering
Publisher: Springer Science and Business Media Deutschland GmbH
Additional Information: The copyright for this article belongs to Springer Science and Business Media Deutschland GmbH
Keywords: Atomic force microscopy; Feedback control; Nanotechnology; Position control, Atomic force; Atomic manipulation; Characterization studies; Compact atomic force microscope; Design and analysis; Displacement amplifier; Model inversion; Nano-positioning; Nanoscale characterization; Scan-head, Adaptive control systems
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 01 Dec 2022 04:51
Last Modified: 01 Dec 2022 04:51
URI: https://eprints.iisc.ac.in/id/eprint/77873

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