Rao, P and Keloth, A and Selvaraja, SK (2022) Thin-film Wafer-Scale Mid-IR Fabry Perot Cavity Gas Sensor. In: Optical Sensors, Sensors 2022, 11 - 15 July 2022, Vancouver.
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Official URL: https://doi.org/10.1364/SENSORS.2022.SM4E.1
Abstract
We demonstrate a miniaturized wafer-scale optical gas sensor that combines the gas cell, an optical filter, and integrated flow channels. Using the module, we demonstrate absorption sensing of ethylene down to 100 ppm-level.
Item Type: | Conference Paper |
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Publication: | Optics InfoBase Conference Papers |
Publisher: | Optica Publishing Group (formerly OSA) |
Additional Information: | The copyright for this article belongs to Optica Publishing Group (formerly OSA). |
Keywords: | Chemical sensors; Fabry-Perot interferometers; Gas detectors, Absorption sensing; Fabry-Perot cavity; Flow channels; Gas cell; Gas-sensors; Optical gas sensors; Thin-films; Wafer scale, Ethylene |
Department/Centre: | Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering |
Date Deposited: | 28 Oct 2022 05:20 |
Last Modified: | 02 May 2023 10:27 |
URI: | https://eprints.iisc.ac.in/id/eprint/77688 |
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