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Thin-film Wafer-Scale Mid-IR Fabry Perot Cavity Gas Sensor

Rao, P and Keloth, A and Selvaraja, SK (2022) Thin-film Wafer-Scale Mid-IR Fabry Perot Cavity Gas Sensor. In: Optical Sensors, Sensors 2022, 11 - 15 July 2022, Vancouver.

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Official URL: https://doi.org/10.1364/SENSORS.2022.SM4E.1


We demonstrate a miniaturized wafer-scale optical gas sensor that combines the gas cell, an optical filter, and integrated flow channels. Using the module, we demonstrate absorption sensing of ethylene down to 100 ppm-level.

Item Type: Conference Paper
Publication: Optics InfoBase Conference Papers
Publisher: Optica Publishing Group (formerly OSA)
Additional Information: The copyright for this article belongs to Optica Publishing Group (formerly OSA).
Keywords: Chemical sensors; Fabry-Perot interferometers; Gas detectors, Absorption sensing; Fabry-Perot cavity; Flow channels; Gas cell; Gas-sensors; Optical gas sensors; Thin-films; Wafer scale, Ethylene
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 28 Oct 2022 05:20
Last Modified: 02 May 2023 10:27
URI: https://eprints.iisc.ac.in/id/eprint/77688

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