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Fluid spectroscopy with piezoelectric ultrasound MEMS transducers

Pratap, R and Dangi, A and Roy, K and Gupta, H (2018) Fluid spectroscopy with piezoelectric ultrasound MEMS transducers. In: Symposium on Wearable Sensors and Systems 1 -and- Microfabricated and Nanofabricated Systems for MEMS/NEMS 14 - AiMES 2018, ECS and SMEQ Joint International Meeting, 30 September - 4 October 2018, Cancun, pp. 13-20.

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Official URL: https://doi.org/10.1149/08616.0013ecst


In this work, Piezoelectric Micromachined Ultrasound Transducers (PMUTs) are explored as a potential MEMS solution for fluid property monitoring. PZT based PMUTs fabricated with three different diameters-1000 urn, 500 urn, 250 urn-showing in-air resonant frequencies between 100 kHz to 2 MHz are tested in water-glycerol mixtures with glycerol concentrations varying between 0 to 80 in both static and dynamic conditions. Spectral shifts of PMUT vibrations with changing fluid environment are quantitatively related to the density and viscosity of the fluid. The density sensitivity of the PMUTs is found to increase from 27 Hz/kg.m"3 for 1000 urn to 365 Hz/kg.m 3 for 250 urn, which is in close agreement with theoretical expectations. Similarly, viscosity sensing is also explored using PMUT arrays. A through-the-fluid ultrasound transmission architecture is proposed for a potential fluid property sensor that can fill the gap of miniature sensors for sensing physical properties of various fluids.

Item Type: Conference Paper
Publication: ECS Transactions
Publisher: Electrochemical Society Inc.
Additional Information: The copyright for this article belongs to the Electrochemical Society Inc.
Keywords: Glycerol; Natural frequencies; Piezoelectric transducers; Piezoelectricity; Transducers; Ultrasonic transducers; Viscosity, Fluid environment; Fluid property; Glycerol concentration; Micromachined ultrasound transducers; Miniature sensors; Static and dynamic conditions; Ultrasound transmissions; Water-glycerol mixtures, Wearable sensors
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 19 Aug 2022 05:15
Last Modified: 19 Aug 2022 05:15
URI: https://eprints.iisc.ac.in/id/eprint/75978

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