Differential Pressure Sensor Using Integrated Optical MEMS and Double Ring Resonator

Pampala, R and Kolli, VR and Srinivas, T (2018) Differential Pressure Sensor Using Integrated Optical MEMS and Double Ring Resonator. In: 3rd IEEE Workshop on Recent Advances in Photonics, WRAP 2017, 18 - 19 December 2017, Hyderabad.

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Abstract

In this work, we designed and simulated a differential pressure sensor using a double ring resonator with radius 5μm and 4μm placed on the fixed of a cantilever beam with dimensions 100μm × 30μm x 5μm. The stress induced on the cantilever changes the refractive index in the waveguide which results in the shift of the resonant wavelength. A sensitivity of 15.544pm/kPa is achieved. The sensor is operated at wavelength equal to 1.55μm and can be used for aircraft, medicine and automobile.

Item Type:	Conference Paper
Publication:	WRAP 2017 - Workshop on Recent Advances in Photonics
Publisher:	Institute of Electrical and Electronics Engineers Inc.
Additional Information:	The copyright for this article belongs to the Institute of Electrical and Electronics Engineers Inc.
Keywords:	Cantilever beams; Nanocantilevers; Pressure sensors; Refractive index, Differential pressure sensor; Double-ring resonators; Optomechanical; Resonant wavelengths; Stress-induced, Optical resonators
Department/Centre:	Division of Electrical Sciences > Electrical Communication Engineering
Date Deposited:	05 Aug 2022 10:21
Last Modified:	05 Aug 2022 10:21
URI:	https://eprints.iisc.ac.in/id/eprint/75373

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