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Evaluation of High Frequency Piezoelectric Micromachined Ultrasound Transducers for Photoacoustic Imaging

Dangi, A and Agrawal, S and Tiwari, S and Jadhav, S and Cheng, C and Trolier-Mckinstry, S and Pratap, R and Kothapalli, S-R (2018) Evaluation of High Frequency Piezoelectric Micromachined Ultrasound Transducers for Photoacoustic Imaging. In: 17th IEEE SENSORS Conference, SENSORS 2018, 28 - 31 October 2018, New Delhi.

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Official URL: https://doi.org/10.1109/ICSENS.2018.8589733


In this work, the design, fabrication, and characterization of piezoelectric micromachined ultrasound transducer (PMUT) arrays for photoacoustic imaging applications are reported. An 80-element linear PMUT array with each element having 53 PMUT cells of 125 11m cell diameter were fabricated using 650 nm thick lead zirconate titanate (PZT) as the active piezoelectric layer. The PMUTs are designed to operate at 10 MHz resonant frequency. The PMUT elements are validated for photoacoustic imaging using an agar gel phantom with embedded pencil leads as the imaging target. Photoacoustic A-line response of the targets captured by single PMUT element shows 7 MHz center frequency with 4.8 MHz bandwidth. B-mode images reconstructed from A-lines recorded during the linear scanning of a single element clearly imaged all the targets, thus validating the potential of the fabricated PMUTs for photoacoustic imaging.

Item Type: Conference Paper
Publication: Proceedings of IEEE Sensors
Publisher: Institute of Electrical and Electronics Engineers Inc.
Additional Information: The copyright for this article belongs to the IEEE.
Keywords: Lead zirconate titanate; MEMS; Natural frequencies; Photoacoustic effect; Piezoelectricity; Transducers; Ultrasonic scattering; Ultrasonic transducers, Agar gel phantom; Center frequency; High frequency HF; Micromachined ultrasound transducers; Photo-acoustic imaging; Piezoelectric layers; PMUTs; Ultrasound transducers, Piezoelectric transducers
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 03 Aug 2022 10:04
Last Modified: 03 Aug 2022 10:04
URI: https://eprints.iisc.ac.in/id/eprint/75261

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