Design and Fabrication of Electro-Thermal 1-D Micro-Mirror

Maharshi, V and Mere, V and Agarwal, A (2019) Design and Fabrication of Electro-Thermal 1-D Micro-Mirror. In: IEEE Electron Device Kolkata Conference, EDKCON 2018, 24 - 25 November 2018, Kolkata, West Bengal, pp. 419-422.

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Abstract

This paper presents design and fabrication of MEMS 1-D micro mirror using thermally actuated bimorph actuator, for out of plane actuation application. Bimorph actuator was made of aluminum and silicon dioxide materials. Micro mirror performance was simulated using COMSOL multiphysics tool. Maximum displacement and temperature profile with voltage along micro mirror were presented. Aluminum was used as heater element as well as top layer of bimorph layer. Micro mirror was successfully released using surface micromachining with copper as sacrificial layer.

Item Type:	Conference Paper
Publication:	Proceedings of International Conference on 2018 IEEE Electron Device Kolkata Conference, EDKCON 2018
Publisher:	Institute of Electrical and Electronics Engineers Inc.
Additional Information:	The copyright for this article belongs to the IEEE.
Keywords:	Actuators; Aluminum compounds; Electron devices; Fabrication; Micromachining; Silica; Surface micromachining, Bimorph actuator; Bimorph layer; COMSOL; Comsol multiphysics; Maximum displacement; Out-of-plane actuation; Sacrificial layer; Temperature profiles, Mirrors
Department/Centre:	Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited:	04 Aug 2022 06:39
Last Modified:	04 Aug 2022 06:39
URI:	https://eprints.iisc.ac.in/id/eprint/75169

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