Energy Based Design and Validation of Latch MEMS g-Switch

Ramanathan, M and Pratap, R (2018) Energy Based Design and Validation of Latch MEMS g-Switch. In: 4th IEEE International Conference on Emerging Electronics, ICEE 2018, 17-19 December 2018, Bengaluru.

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Abstract

This paper presents the design and validation of latch MEMS g-switches based on energy calculations. Modelling of a MEMS g-switch that senses a threshold acceleration is carried and compared against experimental results performed on fabricated devices. The device is modelled as a single-degree-of-freedom system with a spring, mass, damper and a non-linear sliding contact for latching. On applying an input acceleration greater than the threshold value, the device latches closing the circuit, and thus we know that the threshold acceleration is reached. The input energy to the system is characterized from the acceleration-time profile and the energy associated with each component, viz., the spring, mass, damper and the sliding friction is calculated from experiments and energy balance is done on the system. Thus the calculated energies, geometric parameters of the switch designed using energy balance are verified.

Item Type:	Conference Paper
Publication:	2018 4th IEEE International Conference on Emerging Electronics, ICEE 2018
Publisher:	Institute of Electrical and Electronics Engineers Inc.
Additional Information:	The copyright for this article belongs to the Institute of Electrical and Electronics Engineers Inc.
Keywords:	Degrees of freedom (mechanics); Energy balance, Acceleration time; Energy calculation; Energy method; Energy-based design; Inertial sensor; Proof mass; Single degree of freedom systems; Threshold acceleration, Acceleration
Department/Centre:	Division of Mechanical Sciences > Mechanical Engineering Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited:	30 Jul 2022 04:37
Last Modified:	30 Jul 2022 04:37
URI:	https://eprints.iisc.ac.in/id/eprint/75075

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