Silicon Slot Waveguide Mach-Zehnder Using Fixed Electron Beam Moving Stage Patterning Technique

Mere, V and Selvaraja, SK (2019) Silicon Slot Waveguide Mach-Zehnder Using Fixed Electron Beam Moving Stage Patterning Technique. In: 4th IEEE International Conference on Emerging Electronics, ICEE 2018, 17 - 19 December 2018, Bengaluru.

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Abstract

We demonstrate a fixed electron beam (e-beam) moving stage patterned photonics integrated circuit on Silicon-on-insulator platform. The circuit demonstrator consists of power splitter/combiner, wire-to-slot couplers, bend waveguide, and wire waveguides. We present a slot Mach-Zehnder interferometer (MZI) in 1550 nm band with efficient slot mode excitation. We verify slot mode excitation using numerical calculation.

Item Type:	Conference Paper
Publication:	2018 4th IEEE International Conference on Emerging Electronics, ICEE 2018
Publisher:	Institute of Electrical and Electronics Engineers Inc.
Additional Information:	The copyright for this article belongs to Institute of Electrical and Electronics Engineers Inc.
Keywords:	Electron beams; Fixed platforms; Integrated optics; Nanolithography; Optical design; Silicon on insulator technology; Silicon photonics; Waveguides, Machzehnder interferometers (MZI); Numerical calculation; Optical design and fabrication; Patterning techniques; Photonics Integrated Circuits; Power splitters; Silicon-on-insulator platforms; Wire wave guides, Photonic integration technology
Department/Centre:	Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited:	03 Aug 2022 11:10
Last Modified:	03 Aug 2022 11:10
URI:	https://eprints.iisc.ac.in/id/eprint/75067

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