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Analysis of Tilt-Able Inertial Mass with Asymmetric Springs for Inter-Digitated Electrodes

Kumar, M and Sen, S and Mukherjee, B and Swamy, KBM (2018) Analysis of Tilt-Able Inertial Mass with Asymmetric Springs for Inter-Digitated Electrodes. In: 17th IEEE SENSORS Conference, SENSORS 2018, 28-31 october 2018, New Delhi.

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Official URL: https://doi.org/10.1109/ICSENS.2018.8589629


Inter-digitated electrodes of an electrostatic MEMS device comprised of a fixed electrode and a moving electrode attached to a movable mass. A novel structure is explored where the fixed electrodes are attached to an asymmetrically designed tilt-able mass. Tilting of the tilt-able mass results in displacement of the attached electrodes in a direction opposite to the translation of symmetrically designed mass-spring assembly for an applied inertial force. As a result, sense gap variation across the interdigitated electrodes improves resulting in sensitivity enhancement. In this paper, tilt angle and resonant frequency of the asymmetrically designed mass-spring assembly are investigated as a function of spring stiffness. Pull-in voltage reduction of 7.7 is also reported for the proposed design compared to the conventional designs. Discussed study will add flexibility in realizing the tilt-able mass-spring assembly by designing novel springs as long as the required stiffness combinations are sustained.

Item Type: Conference Paper
Publication: Proceedings of IEEE Sensors
Publisher: Institute of Electrical and Electronics Engineers Inc.
Additional Information: The copyright for this article belongs to the Institute of Electrical and Electronics Engineers Inc.
Keywords: Natural frequencies; Sensitivity analysis; Stiffness, Conventional design; Electrostatic MEMS devices; Inter-digitated electrodes; Moving electrodes; Novel structures; Pull-in voltage; Sensitivity enhancements; Spring stiffness, Electrodes
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 29 Jul 2022 10:02
Last Modified: 29 Jul 2022 10:02
URI: https://eprints.iisc.ac.in/id/eprint/75046

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