Enabling Fabrication of PZT Based PiezoMEMS Devices

Tiwari, S and Kumar, R and Dangi, A and Pratap, R (2018) Enabling Fabrication of PZT Based PiezoMEMS Devices. In: 17th IEEE SENSORS Conference, SENSORS 2018, 28-31 october 2018, New Delhi.

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Abstract

We report a robust process flow for fabrication of PiezoMEMS devices with Lead Zirconate Titanate thin film as the active piezoelectric material. This process flow can overcome all contamination issues that plague processing PZT thin films in a shared facility. We use wet etch recipes for etching of the bottom electrode (platinum) and PZT. We propose sidewall coverage of PZT and Pt film while carrying out deep silicon etch in DRIE to avoid possible exposure of these contaminating materials to the tool. With this process, we have fabricated a gyroscope structure with electrostatic comb drive actuation and piezoelectric sensing. The structure is tested for actuation using PZT film on the beam just to verify the integrity of the active layer.

Item Type:	Conference Paper
Publication:	Proceedings of IEEE Sensors
Publisher:	Institute of Electrical and Electronics Engineers Inc.
Additional Information:	The copyright for this article belongs to the Institute of Electrical and Electronics Engineers Inc.
Keywords:	Etching; Fabrication; Gyroscopes; Lead zirconate titanate; Piezoelectricity, Active Layer; Bottom electrodes; Electrostatic comb drives; Lead zirconate titanate thin films; Piezoelectric gyroscopes; PiezoMEMS; Process flows; PZT thin film, Thin films
Department/Centre:	Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited:	29 Jul 2022 09:39
Last Modified:	29 Jul 2022 09:39
URI:	https://eprints.iisc.ac.in/id/eprint/75041

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