Silicon Photonics Based On-Chip Cantilever Vibration Measurement

Mere, V and Dash, A and Kallega, R and Pratap, R and Naik, A and Selvaraja, SK (2018) Silicon Photonics Based On-Chip Cantilever Vibration Measurement. In: 17th IEEE SENSORS Conference, SENSORS 2018, 28-31 october 2018, New Delhi.

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Abstract

In this paper, we demonstrate a compact Silicon photonics based vibrometer using an on-chip photonic grating-based sensor. The grating sensor works on the principle of interference where the motion of the cantilever is captured at the output as an intensity variation. The advantage of the grating sensor over conventional Laser Doppler vibrometer is increased tolerance to alignment errors as both the grating and the cantilever can be integrated on a single chip. The grating parameters are optimized using 2D-FDTD to achieve a maximum sensitivity to the displacement of a cantilever. Experimentally, we demonstrate dynamic measurements of a cantilever resonant mode.

Item Type:	Conference Paper
Publication:	Proceedings of IEEE Sensors
Publisher:	Institute of Electrical and Electronics Engineers Inc.
Additional Information:	The copyright for this article belongs to the Institute of Electrical and Electronics Engineers Inc.
Keywords:	Nanocantilevers; Photonic devices; Sensors; Vibration measurement; Waveguides, Cantilever; Conventional lasers; Dynamic measurement; grating; Grating-based sensors; Intensity variations; Maximum sensitivity; On-chip photonics, Silicon photonics
Department/Centre:	Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited:	29 Jul 2022 09:27
Last Modified:	29 Jul 2022 09:27
URI:	https://eprints.iisc.ac.in/id/eprint/75039

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