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High-Performance Pmuts with Bossed Diaphragms for Acoustic and Near-Ultrasound Applications

Gupta, H and Nayak, B and Ashok, A and Pratap, R (2022) High-Performance Pmuts with Bossed Diaphragms for Acoustic and Near-Ultrasound Applications. In: 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022, 9 January 2022 through 13 January 2022, Tokyo, pp. 826-829.

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Official URL: https://doi.org/10.1109/MEMS51670.2022.9699688


This paper presents a novel design of PMUTs with bossed diaphragms for frequencies near the upper limits of human hearing. The dimensions of a central boss on a circular diaphragm were optimized to minimize resonance frequencies. The current design makes the devices 3x smaller than conventional PMUTs for the same frequencies, and the devices exhibit up to 5x higher quality factors. These devices have a higher mechanical impedance making them less sensitive to the operating media and are suitable for both air-coupled and liquid-coupled applications such as ranging, proximity sensing, level-sensing, and communication. With low operating voltages, these transducers have the potential to revolutionize how ultrasound is used in next generation wearables and IoT devices.

Item Type: Conference Paper
Publication: IEEE Symposium on Mass Storage Systems and Technologies
Publisher: IEEE Computer Society
Additional Information: The copyright for this article belongs to the IEEE Computer Society
Keywords: Acoustic impedance; Diaphragms; Ultrasonics, Bossed diaphragm; Circular diaphragms; Data over sound; Human hearing; Near-ultrasound; Novel design; Performance; Piezoelectric; PMUT; Upper limits, Audition
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 06 Jul 2022 05:26
Last Modified: 06 Jul 2022 05:26
URI: https://eprints.iisc.ac.in/id/eprint/74220

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