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Novel Estimation Method for Dielectric Loss Quality Factor in Composite SOI/PZT Devices

Kumar, V and Tiwari, S and Joshi, S and Chandorkar, SA (2022) Novel Estimation Method for Dielectric Loss Quality Factor in Composite SOI/PZT Devices. In: 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022, 9 January 2022 through 13 January 2022, Tokyo, pp. 754-757.

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Official URL: https://doi.org/10.1109/MEMS51670.2022.9699467


We present data and analysis of low temperature (10K-300K) characterization of device (cantilever) based on lead zirconate titanate (PZT) film on SOI (silicon on insulator) platform to study the dependence of energy losses for first in-plane (IPFM) and first out-of-plane (OPFM) mode frequency. The cantilever is actuated and sensed using a differential mechanism to minimize capacitive feedthrough. The dielectric behavior of piezoelectric material affects the quality of the film (specially loss) and the transduction while integrating with substrate. Such quality can be revealed by quality factor. To estimate the quality factor associated with dielectric losses, a novel method is employed by combining measurements of temperature dependent real and imaginary part of dielectric function at the resonant frequencies, a LDV measurement using differential drive, and ulation using COMSOL.

Item Type: Conference Paper
Publication: IEEE Symposium on Mass Storage Systems and Technologies
Publisher: IEEE Computer Society
Additional Information: The copyright for this article belongs to IEEE Computer Society.
Keywords: Dielectric devices; Dielectric losses; Digital storage; Ferroelectric ceramics; Nanocantilevers; Natural frequencies; Silicon on insulator technology; Temperature, Cryogenic measurement; Differential drive; Differential drive and sense; Estimation methods; Lead zirconate-titanate; Lows-temperatures; Piezo silicon on insulator; Quality factors; Silicon on insulator, Lead zirconate titanate
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 05 Jul 2022 12:03
Last Modified: 05 Jul 2022 12:03
URI: https://eprints.iisc.ac.in/id/eprint/74219

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