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A PMUT based photoacoustic system as a microfluidic concentration detector

Roy, K and Shastri, V and Kumar, A and Rout, J and Isha, I and Kalyan, K and Prakash, J and Pratap, R (2022) A PMUT based photoacoustic system as a microfluidic concentration detector. In: Photons Plus Ultrasound: Imaging and Sensing 2022, 20-24 February 2022, Virtual, Online at San Francisco, California, United States,.

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Official URL: https://doi.org/10.1117/12.2608934


We report on the development of a novel piezo-MEMS-based optofluidic platform to detect the concentration of various species dissolved in a fluid. This platform employs piezoelectric micromachined ultrasound transducers (PMUTs) to work as a photoacoustic receiver, receiving ultrasound from fluid targets present in microfluidic channels while illuminated with a nanosecond pulsed laser. We fabricate both the PMUTs and the microfluidic channels and subsequently use them for the experiment. We also show the capability of PMUTs as a general photoacoustic receiver and demonstrate its signal-to-noise characteristics (31) and its wide fractional bandwidth (73). © 2022 SPIE.

Item Type: Conference Paper
Publication: Progress in Biomedical Optics and Imaging - Proceedings of SPIE
Publisher: SPIE
Additional Information: The copyright for this article belongs to the SPIE.
Keywords: Bandwidth; Fluidic devices; Microfluidics; Photoacoustic effect; Photons; Signal receivers; Signal to noise ratio; Ultrasonic applications; Ultrasonic transducers, Concentration detections; Concentration detectors; Micro-fabrication; Microfluidic concentrations; Microfluidics channels; Micromachined ultrasound transducers; Photoacoustic systems; Piezo-MEMS; Piezoelectric; Piezoelectric micromachined ultrasound transducer, MEMS
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 21 Jun 2022 09:40
Last Modified: 21 Jun 2022 09:40
URI: https://eprints.iisc.ac.in/id/eprint/73950

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