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Molybdenum Disulfide Membrane-based Ultrasensitive Temperature Sensor

Arora, N and Naik, A (2021) Molybdenum Disulfide Membrane-based Ultrasensitive Temperature Sensor. In: 20th IEEE Sensors, SENSORS 2021, 31 Oct-4 Nov 2021, Virtual, Online.

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Official URL: https://doi.org/10.1109/SENSORS47087.2021.9639750


We report an ultrathin molybdenum disulfide (MoS2) membrane-based temperature sensor with sensitivity in the sub-Kelvin range. The resonant frequency of ultrathin MoS2 resonators is extremely sensitive to the intrinsic strain of the membrane. We utilize the resonant frequency shift caused due to change in strain to demonstrate the potential of these devices for ultrasensitive temperature sensing. The temperature coefficient of frequency (TCf) of the MoS2 drum resonator is estimated to be -283 ppm/K. We also report the first study on the frequency stability of MoS2 resonators at room temperature. The Allan deviation of these resonators is ~5 � 10-5 at an integration time of 1 second. This study estimates the ultimate temperature detection limit of MoS2 membrane-based device. © 2021 IEEE.

Item Type: Conference Paper
Publication: Proceedings of IEEE Sensors
Publisher: Institute of Electrical and Electronics Engineers Inc.
Additional Information: The copyright for this article belongs to Institute of Electrical and Electronics Engineers Inc.
Keywords: Frequency stability; Layered semiconductors; Molybdenum compounds; Natural frequencies; Resonators; Temperature; Temperature sensors, Allan deviation; Integration time; Intrinsic strain; Membrane-based; Resonant frequency shift; Temperature coefficient-of-frequency; Temperature sensing; Two-dimensional materials; Ultra-thin; Ultrasensitive, Sulfur compounds
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 13 Feb 2022 08:47
Last Modified: 13 Feb 2022 08:47
URI: http://eprints.iisc.ac.in/id/eprint/71388

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