Sputter-deposited PZT-on-Silicon electro-optic modulator

Singh, S and Selvaraja, SK (2021) Sputter-deposited PZT-on-Silicon electro-optic modulator. In: 2021 IEEE Photonics Conference, 18-21 Oct 2021, Virtual, Online.

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Abstract

We present for the first time sputter deposition of PZT -on-SOl for electro-optic modulation. We present material, electric and electro-optic characteristics of a thin-film PZT -on-silicon. We demonstrate DC electro-optic characteristics using a ring resonator with a shift of 12.5 pm/V. © 2021 IEEE.

Item Type:	Conference Paper
Publication:	2021 IEEE Photonics Conference, IPC 2021 - Proceedings
Publisher:	Institute of Electrical and Electronics Engineers Inc.
Additional Information:	The copyright for this article belongs to Institute of Electrical and Electronics Engineers Inc.
Keywords:	Electrooptical devices; Ferroelectric materials; Lead compounds; Photonic devices; Silicon photonics; Sols; Zirconium compounds, A-RINGS; Electro-optic characteristic; Electro-optic modulation; Electro-optic modulators; Ferroelectrics materials; Lead zirconium titanate; Lead-zirconium titanate (PZT); Ring resonator; Thin-films, Light modulation
Department/Centre:	Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited:	07 Feb 2022 12:22
Last Modified:	07 Feb 2022 12:22
URI:	http://eprints.iisc.ac.in/id/eprint/71288

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