ePrints@IIScePrints@IISc Home | About | Browse | Latest Additions | Advanced Search | Contact | Help

Sputter-deposited PZT-on-Silicon electro-optic modulator

Singh, S and Selvaraja, SK (2021) Sputter-deposited PZT-on-Silicon electro-optic modulator. In: 2021 IEEE Photonics Conference, 18-21 Oct 2021, Virtual, Online.

[img] PDF
IEEE_IPC_2021.pdf - Published Version
Restricted to Registered users only

Download (693kB) | Request a copy
Official URL: https://doi.org/10.1109/IPC48725.2021.9592886


We present for the first time sputter deposition of PZT -on-SOl for electro-optic modulation. We present material, electric and electro-optic characteristics of a thin-film PZT -on-silicon. We demonstrate DC electro-optic characteristics using a ring resonator with a shift of 12.5 pm/V. © 2021 IEEE.

Item Type: Conference Paper
Publication: 2021 IEEE Photonics Conference, IPC 2021 - Proceedings
Publisher: Institute of Electrical and Electronics Engineers Inc.
Additional Information: The copyright for this article belongs to Institute of Electrical and Electronics Engineers Inc.
Keywords: Electrooptical devices; Ferroelectric materials; Lead compounds; Photonic devices; Silicon photonics; Sols; Zirconium compounds, A-RINGS; Electro-optic characteristic; Electro-optic modulation; Electro-optic modulators; Ferroelectrics materials; Lead zirconium titanate; Lead-zirconium titanate (PZT); Ring resonator; Thin-films, Light modulation
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 07 Feb 2022 12:22
Last Modified: 07 Feb 2022 12:22
URI: http://eprints.iisc.ac.in/id/eprint/71288

Actions (login required)

View Item View Item