Development of Frequency Tunable Fluid Loaded PMUTs

Roy, K and Kalyan, K and Ashok, A and Shastri, V and Pratap, R (2021) Development of Frequency Tunable Fluid Loaded PMUTs. In: 2021 IEEE International Ultrasonics Symposium, 11-16 Sep 2011, Virtual, Online.

PDF IUS_2021.pdf - Published Version Restricted to Registered users only Download (1MB) | Request a copy

Abstract

We report on the development of a novel technique for creating real-time frequency tuning in Piezoelectric Micromachined Ultrasound Transducers (PMUTs). This technique employs controlled virtual added mass in a confined microfluidic environment as a switch to tune the resonant frequency of a PMUT. Using this technique, we could vary the frequency of a 500m circular PMUT from 489 kHz to 210 kHz, corresponding to a tuning range of 57. This shows the potential of using such a technique in creating PMUTs with a wide range of frequency tuning. © 2021 IEEE.

Item Type:	Conference Paper
Publication:	IEEE International Ultrasonics Symposium, IUS
Publisher:	IEEE Computer Society
Additional Information:	The copyright for this article belongs to IEEE Computer Society
Department/Centre:	Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited:	01 Feb 2022 12:37
Last Modified:	01 Feb 2022 12:37
URI:	http://eprints.iisc.ac.in/id/eprint/71204

Actions (login required)

View Item