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Development of Frequency Tunable Fluid Loaded PMUTs

Roy, K and Kalyan, K and Ashok, A and Shastri, V and Pratap, R (2021) Development of Frequency Tunable Fluid Loaded PMUTs. In: 2021 IEEE International Ultrasonics Symposium, 11-16 Sep 2011, Virtual, Online.

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Official URL: https://doi.org/10.1109/IUS52206.2021.9593352


We report on the development of a novel technique for creating real-time frequency tuning in Piezoelectric Micromachined Ultrasound Transducers (PMUTs). This technique employs controlled virtual added mass in a confined microfluidic environment as a switch to tune the resonant frequency of a PMUT. Using this technique, we could vary the frequency of a 500m circular PMUT from 489 kHz to 210 kHz, corresponding to a tuning range of 57. This shows the potential of using such a technique in creating PMUTs with a wide range of frequency tuning. © 2021 IEEE.

Item Type: Conference Paper
Publication: IEEE International Ultrasonics Symposium, IUS
Publisher: IEEE Computer Society
Additional Information: The copyright for this article belongs to IEEE Computer Society
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 01 Feb 2022 12:37
Last Modified: 01 Feb 2022 12:37
URI: http://eprints.iisc.ac.in/id/eprint/71204

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