Emerging high-k dielectrics for nanometer CMOS technologies and memory devices

Misra, DD and Bhuyian, MNU and Ding, YM and Ganapathi, KL and Bhat, N (2020) Emerging high-k dielectrics for nanometer CMOS technologies and memory devices. [Book Chapter]

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Item Type:	Book Chapter
Publication:	Advanced Technologies for Next Generation Integrated Circuits
Publisher:	Institution of Engineering and Technology
Additional Information:	The copyright for this article belongs to Institution of Engineering and Technology
Department/Centre:	Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited:	28 Nov 2021 09:59
Last Modified:	28 Nov 2021 09:59
URI:	http://eprints.iisc.ac.in/id/eprint/70322

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