CHEMICAL STRUCTURE AND FUNCTIONAL PROPERTIES OF AMORPHOUS BORON CARBONITRIDE FILMS

Sulyaeva, VS and Gatapova, EY and Kozhevnikov, AK and Rogilo, DI and Saraev, AA and Yushina, IV and Khomyakov, MN and Shapovalova, AA and Shayapov, VR and Bhaskar, N and Tu, R and Kosinova, ML (2021) CHEMICAL STRUCTURE AND FUNCTIONAL PROPERTIES OF AMORPHOUS BORON CARBONITRIDE FILMS. In: Journal of Structural Chemistry, 62 (8). pp. 1309-1324.

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Abstract

Abstract: We report a comprehensive study of the effect of the chemical structure of boron carbonitride films on the variability of their functional characteristics. The BCxNy films are prepared on Si(100) and fused silica substrates by reactive magnetron sputtering of a B4C target in an argon/nitrogen mixture. The deposition rate, elemental composition, and types of chemical bonds in the films is studied depending on the nitrogen content in the gas mixture. Optical (refractive index, transmission coefficient, band gap) and mechanical (hardness, Young�s modulus, substrate adhesion) characteristics are investigated depending on the deposition parameters and the chemical structure of the films. Particular attention is paid to the surface properties of the BCxNy films (morphology, roughness, contact angle, and surface free energy). Stability of the BCxNy films upon storage in air is studied for the first time. The data obtained for the composition, structural characteristics, and some functional properties of the BCxNy films are compared with those reported in literature. © 2021, Pleiades Publishing, Ltd.

Item Type:	Journal Article
Publication:	Journal of Structural Chemistry
Publisher:	Pleiades journals
Additional Information:	The copyright for this article belongs to Pleiades journals
Department/Centre:	Division of Mechanical Sciences > Materials Engineering (formerly Metallurgy)
Date Deposited:	03 Dec 2021 08:39
Last Modified:	03 Dec 2021 08:39
URI:	http://eprints.iisc.ac.in/id/eprint/70257

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