Study on the thermoelectric properties of Al-ZnO thin-film stack fabricated by physical vapour deposition process for temperature sensing

Saravanavel, G and Honnali, SK and Lourdes, KS and John, S and Gunasekhar, KR (2021) Study on the thermoelectric properties of Al-ZnO thin-film stack fabricated by physical vapour deposition process for temperature sensing. In: Sensors and Actuators A: Physical, 332 .

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Abstract

In this work, Al-ZnO thin-film stacks were fabricated by the physical vapour deposition (PVD) process. ZnO films with different oxygen compositions were deposited by reactive DC magnetron sputtering. According to the results, it was observed that the deposition parameters influenced the thin film's thermoelectric properties. The thermoemf response of the Al-ZnO stacks was studied through experiments to calibrate the same as a thin-film thermocouple (TFTC). The best linear response was observed for the stack with ZnO having an oxygen composition of 80.45 for temperatures between 360 K and 400 K. The stack showed a sensitivity of 5.22 mV/K and 0.78 mV/K, in the same temperature range, on the glass substrate and the sucrose substrate, respectively. A comparative study of the thermoemf response was carried out between Al-ZnO and Al-Ag stacks on glass and sucrose substrates, and wired thermocouples. © 2021 Elsevier B.V.

Item Type:	Journal Article
Publication:	Sensors and Actuators A: Physical
Publisher:	Elsevier B.V.
Additional Information:	The copyright for this article belongs to Elsevier B.V.
Keywords:	Binary alloys; Fabrication; Glass; II-VI semiconductors; Oxygen; Physical vapor deposition; Silver alloys; Substrates; Sugar (sucrose); Thermocouples; Thermoelectric equipment; Thermoelectricity; Thin films; Zinc oxide, Figure of merit; Physical vapor deposition process; Properties of Al; Temperature sensing; Thermoelectric efficiency; Thermoelectric properties; Thermoelement; Thin film stacks; ZnO films; ZnO thin film, Metallic films
Department/Centre:	Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited:	03 Dec 2021 08:35
Last Modified:	03 Dec 2021 08:35
URI:	http://eprints.iisc.ac.in/id/eprint/70236

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