Maharshi, V and Mere, V and Agarwal, A (2021) Modeling of Electrothermal Microactuator. In: International Conference on Computational Mathematics in Nanoelectronics and Astrophysics, CMNA 2018, 1-3 Nov 2018, Indore, pp. 107-115.
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This paper presents the modeling of electrothermally actuated bimorph actuator for out-of-plane actuation application. Al-Si bimorph was optimized for higher displacement applications. Temperature distribution analysis of the Al-Si bimorph combination was chosen due to their larger displacement range. The modeling of Al-Si was performed with FEM and analytical analysis. Temperature distribution across the bimorph actuator with respect to length and applied voltage was optimized using FEM, lumped, and analytical analysis. The maximum temperature across Al-Si bimorph was achieved around 106 °C without convection and 85 °C with convection. © 2021, The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd.
| Item Type: | Conference Paper |
|---|---|
| Publication: | Springer Proceedings in Mathematics and Statistics |
| Publisher: | Springer |
| Additional Information: | The copyright for this article belongs to Springer |
| Keywords: | Actuators; Astrophysics; Nanoelectronics; Silicon; Silicon compounds; Temperature distribution, Analytical analysis; Applied voltages; Bimorph actuator; Electro-thermal microactuators; Maximum temperature; Out-of-plane actuation; Temperature distribution analysis, Aluminum compounds |
| Department/Centre: | Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering |
| Date Deposited: | 25 Aug 2021 06:22 |
| Last Modified: | 25 Aug 2021 06:22 |
| URI: | http://eprints.iisc.ac.in/id/eprint/69378 |
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