ePrints@IIScePrints@IISc Home | About | Browse | Latest Additions | Advanced Search | Contact | Help

Modeling of Electrothermal Microactuator

Maharshi, V and Mere, V and Agarwal, A (2021) Modeling of Electrothermal Microactuator. In: International Conference on Computational Mathematics in Nanoelectronics and Astrophysics, CMNA 2018, 1-3 Nov 2018, Indore, pp. 107-115.

Full text not available from this repository. (Request a copy)
Official URL: https://doi.org/10.1007/978-981-15-9708-4_9


This paper presents the modeling of electrothermally actuated bimorph actuator for out-of-plane actuation application. Al-Si bimorph was optimized for higher displacement applications. Temperature distribution analysis of the Al-Si bimorph combination was chosen due to their larger displacement range. The modeling of Al-Si was performed with FEM and analytical analysis. Temperature distribution across the bimorph actuator with respect to length and applied voltage was optimized using FEM, lumped, and analytical analysis. The maximum temperature across Al-Si bimorph was achieved around 106 °C without convection and 85 °C with convection. © 2021, The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd.

Item Type: Conference Paper
Publication: Springer Proceedings in Mathematics and Statistics
Publisher: Springer
Additional Information: The copyright for this article belongs to Springer
Keywords: Actuators; Astrophysics; Nanoelectronics; Silicon; Silicon compounds; Temperature distribution, Analytical analysis; Applied voltages; Bimorph actuator; Electro-thermal microactuators; Maximum temperature; Out-of-plane actuation; Temperature distribution analysis, Aluminum compounds
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 25 Aug 2021 06:22
Last Modified: 25 Aug 2021 06:22
URI: http://eprints.iisc.ac.in/id/eprint/69378

Actions (login required)

View Item View Item