An optical beam deflection based system for multi-axis out-of-plane motion measurement at multiple points

Piyush, P and Jayanth, GR (2020) An optical beam deflection based system for multi-axis out-of-plane motion measurement at multiple points. In: Review of Scientific Instruments, 91 (12).

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Abstract

This note presents an optical beam deflection-based measurement system to make multi-axis out-of-plane motion measurement at multiple points on both micro- and macro-scale targets. A novel automated calibration stage has been designed to change the measurement locations on the target and to calibrate the sensitivity matrix of the measurement system at each location. The developed measurement system is validated by measuring the rigid body rotation of a target, after which its utility is demonstrated by performing dynamic characterization of a micro-electro-mechanical system micro-cantilever beam in order to obtain its first two mode shapes. © 2020 Author(s).

Item Type:	Journal Article
Publication:	Review of Scientific Instruments
Publisher:	American Institute of Physics Inc.
Additional Information:	Copyright to this article belongs to American Institute of Physics Inc.
Keywords:	Equipment, devices and apparatus; Instruments, Automated calibration; Dynamic characterization; Measurement locations; Micro electro mechanical system; Microcantilever beams; Optical beam deflection; Out-of-plane motion; Rigid body rotation, MEMS, article; rotation
Department/Centre:	Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited:	01 Feb 2021 10:00
Last Modified:	01 Feb 2021 10:00
URI:	http://eprints.iisc.ac.in/id/eprint/67835

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