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Silicon Photonics enabled on-chip Optical Readout of piezoMEMS Resonators

Mere, V and Tiwari, S and Dash, A and Kallega, R and Naik, A and Pratap, R and Selvaraja, SK (2020) Silicon Photonics enabled on-chip Optical Readout of piezoMEMS Resonators. In: Proceedings of IEEE Sensors, 25-28 October 2020, Virtual, Rotterdam; Netherlands.

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Official URL: https://dx.doi.org/10.1109/SENSORS47125.2020.92788...


In this paper, we present the first demonstration of a promising technology that enables integration of a PiezoMEMS device and on-chip optical read-out. We demonstrate sensor integration by bonding a PZT-based microbeam on a silicon photonics-based resonance interrogator. We report on-chip measurement of three resonance modes of PiezoMEMS beam. We find excellent agreement between on-chip photonics and conventional LDV measurement. We also demonstrate measurement in a vacuum with one-order improvement in the quality factor of the fundamental resonance mode © 2020 IEEE.

Item Type: Conference Paper
Publication: Proceedings of IEEE Sensors
Publisher: Institute of Electrical and Electronics Engineers Inc.
Additional Information: cited By 0; Conference of 2020 IEEE Sensors, SENSORS 2020 ; Conference Date: 25 October 2020 Through 28 October 2020; Conference Code:165760
Keywords: Photonic devices; Resonance, Fundamental resonance; LDV measurements; On chip measurements; On-chip photonics; Optical readout; Quality factors; Resonance mode; Sensor integration, Silicon photonics
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 21 Jan 2021 06:02
Last Modified: 21 Jan 2021 06:02
URI: http://eprints.iisc.ac.in/id/eprint/67724

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