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A Single Cell PMUT as a Bio-Fluid Density Sensor

Roy, K and Mandal, A and Ashok, A and Gupta, H and Shastri, V and Pratap, R (2020) A Single Cell PMUT as a Bio-Fluid Density Sensor. In: 2020 IEEE International Ultrasonics Symposium, 7-11 Sept. 2020, Las Vegas, NV, USA, USA.

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Official URL: https://dx.doi.org/10.1109/IUS46767.2020.9251809


A compact single cell piezoelectric micromachined ultrasound transducer (PMUT) with dual electrodes is designed, fabricated, and used to measure the density of a fluid mixture mimicking the range of human blood density variation. The sensor's novelty lies in its compactness enabled by on device sensing and actuation due to the dual electrodes. The active material used here is thin film PZT which is protected from the fluid environment with an appropriate coating. The results obtained show a linear response of the sensor output over the density range of interest with no appreciable degradation in the signal due to immersion in a fluid. The sensitivity of the sensor is 191 Hz/Kg/m3. These single cell PMUTs are, therefore, potential candidates for fluid density monitoring in industrial or biomedical applications. © 2020 IEEE.

Item Type: Conference Paper
Publication: IEEE International Ultrasonics Symposium, IUS
Publisher: IEEE Computer Society
Additional Information: cited By 0; Conference of 2020 IEEE International Ultrasonics Symposium, IUS 2020 ; Conference Date: 7 September 2020 Through 11 September 2020; Conference Code:165031
Keywords: Medical applications; Ultrasonic transducers, Active material; Biomedical applications; Density variations; Dual electrodes; Fluid densities; Fluid environment; Linear response; Micromachined ultrasound transducers, Electrodes
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 19 Jan 2021 09:39
Last Modified: 19 Jan 2021 09:39
URI: http://eprints.iisc.ac.in/id/eprint/67534

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