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Development of Micromachined Piezoelectric Near-Ultrasound Transducers for Data-over-Sound

Gupta, H and Nayak, B and Roy, K and Ashok, A and A, AJ and Pratap, R (2020) Development of Micromachined Piezoelectric Near-Ultrasound Transducers for Data-over-Sound. In: IEEE International Ultrasonics Symposium, IUS, 7-11 Sept. 2020, Las Vegas, NV, USA, USA.

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Official URL: https://dx.doi.org/10.1109/IUS46767.2020.9251747


Data-over-sound is an emerging technology for digital data communication which uses frequencies at the upper bounds of human hearing, usually between 15 kHz to 25 kHz. We report the successful development of Micromachined Piezoelectric Near-Ultrasound Transducers for low power data-over-sound applications. Lead zirconate titanate thin films used in Piezoelectric Micromachined Ultrasonic Transducers can have high residual tensile stresses ranging from 300 MPa to 1.5 GPa. These stresses raise the resonant frequencies of the transducers, making it a challenge to fabricate low frequency devices. Using the optimum dimensions by estimating the net residual stress inside the fabricated diaphragm, a low power transducer with a target frequency range of 17 kHz to 21 kHz was fabricated, capable of generating as much as 83 dB of sound pressure level at a distance of 5 cm for continuous operation. © 2020 IEEE.

Item Type: Conference Paper
Publication: IEEE International Ultrasonics Symposium, IUS
Publisher: IEEE Computer Society
Additional Information: cited By 0; Conference of 2020 IEEE International Ultrasonics Symposium, IUS 2020 ; Conference Date: 7 September 2020 Through 11 September 2020; Conference Code:165031
Keywords: Audition; Lead zirconate titanate; Natural frequencies; Piezoelectric transducers; Piezoelectricity; Transducers; Ultrasonic scattering, Continuous operation; Digital data communications; Emerging technologies; Lead zirconate titanate thin films; Micro-machined ultrasonic transducer; Residual tensile stress; Sound pressure level; Ultrasound transducers, Ultrasonic transducers
Department/Centre: Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited: 22 Jan 2021 05:31
Last Modified: 22 Jan 2021 05:31
URI: http://eprints.iisc.ac.in/id/eprint/67533

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