Vishwaraj, NP and Nataraj, CT and Jagannath, RPK and Gurusiddappa, P and Talabattula, S (2020) Chip-scale temperature-compensated superstructured waveguide bragg grating based multiparametric sensor. In: Current Optics and Photonics, 4 (4). pp. 293-301.
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Abstract
In this paper we propose and theoretically analyze a monolithic multiparametric sensor consisting of a superstructure of surface-relief waveguide Bragg gratings (WBGs), a micro-machined diaphragm, and a cantilever beam. Diaphragms of two different configurations, namely circular and square, are designed and analyzed separately for pressure measurement. The square diaphragm is then selected for further study, since it shows relatively higher sensitivity compared to the circular one, as it incurs more induced stress when any pressure is applied. The cantilever beam with a proof mass is designed to enhance the sensitivity for acceleration measurement. A unique mathematical method using coupled-mode theory and the transfer-matrix method is developed to design and analyze the shift in the Bragg wavelength of the superstructure configuration of the gratings, due to simultaneously applied pressure and acceleration. The effect of temperature on the wavelength shift is compensated by introducing another Bragg grating in the superstructure configuration. The measured sensitivities for pressure and acceleration are found to be 0.21 pm/Pa and 6.49 nm/g respectively. © 2020 Current Optics and Photonics.
| Item Type: | Journal Article |
|---|---|
| Publication: | Current Optics and Photonics |
| Publisher: | Optical Society of Korea |
| Additional Information: | The copyright of this article belngs to Optical Society of Korea |
| Keywords: | Acceleration measurement; Bragg gratings; Cantilever beams; Nanocantilevers; Waveguides, Applied pressure; Bragg wavelength; Coupled mode theory; Effect of temperature; Mathematical method; Multiparametric sensors; Temperature compensated; Waveguide Bragg grating, Transfer matrix method |
| Department/Centre: | Division of Electrical Sciences > Electrical Communication Engineering |
| Date Deposited: | 22 Sep 2020 06:08 |
| Last Modified: | 22 Sep 2020 06:08 |
| URI: | http://eprints.iisc.ac.in/id/eprint/66558 |
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