Optical diffraction based single image method to obtain nanometer resolution deflection profiles in micro-cantilever based sensors

Phani, A (2010) Optical diffraction based single image method to obtain nanometer resolution deflection profiles in micro-cantilever based sensors. In: Applied Industrial Optics: Spectroscopy, Imaging and Metrology, 07-06-2010.

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Abstract

Profiling of Micro-cantilever (MC) based sensor bending due to molecular recognition induced surface stress changes by OBD method requires multiple measurements along the length of the microstructure. A single image Optical Diffraction based profiling method is proposed employing a double micro-cantilever structure achieving deflection resolutions of 1nm and surface stress changes of 50μN/m in a typical MC. © 2010 Optical Society of America.

Item Type:	Conference Paper
Publication:	Optics InfoBase Conference Papers
Publisher:	Optical Society of America (OSA)
Additional Information:	cited By 0; Conference of Applied Industrial Optics: Spectroscopy, Imaging and Metrology, AIO 2010 ; Conference Date: 7 June 2010 Through 8 June 2010; Conference Code:103075
Keywords:	Diffraction; Surface properties, Deflection profiles; Micro-cantilevers; Multiple measurements; Nanometer resolutions; Optical diffractions; Profiling methods; Single images; Surface stress, Nanocantilevers
Department/Centre:	Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited:	22 Sep 2021 10:02
Last Modified:	22 Sep 2021 10:02
URI:	http://eprints.iisc.ac.in/id/eprint/65835

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