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Diaphragm-type acoustic sensor based on sputtered piezoelectric thin film

Garg, A and Rajanna, K (2005) Diaphragm-type acoustic sensor based on sputtered piezoelectric thin film. In: Sensors and Materials, 17 (8). pp. 423-432.

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In this paper, we report the development of a low-cost acoustic sensor using piezoelectric ZnO thin film deposited onto a thin stainless-steel diaphragm. The details of the diaphragm and the mechanical assembly of the sensor are given. Reactive magnetron sputtering has been used for the preparation of piezoelectric ZnO film. Studies on the characterization of the ZnO films for the confirmation of their piezoelectric behavior are included. Observations on the performance of the acoustic sensor are presented, which include frequency response characteristics, sensitivity and linearity. In comparison with general acoustic sensors, our acoustic sensor is attractive in view of its low cost, lower weight and simpler fabrication methods.

Item Type: Journal Article
Publication: Sensors and Materials
Publisher: MYU KK
Additional Information: The copyright of this article belongs to MYU KK
Keywords: Acoustic sensor;Diaphragm;Piezoelectric thin film;Sound pressure level;Frequency response
Department/Centre: Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited: 09 Feb 2007
Last Modified: 28 Apr 2017 10:56
URI: http://eprints.iisc.ac.in/id/eprint/6419

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