Thin Film PZT-Based PMUT Arrays for Deterministic Particle Manipulation

Cheng, Christopher Y and Dangi, Ajay and Ren, Liqiang and Tiwari, Sudhanshu and Benoit, Robert R and Qiu, Yongqiang and Lay, Holly S and Agrawal, Sumit and Pratap, Rudra and Kothapalli, Sri-Rajasekhar and Mallouk, Thomas E and Cochran, Sandy and Trolier-Mckinstry, Susan (2019) Thin Film PZT-Based PMUT Arrays for Deterministic Particle Manipulation. In: IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 66 (10). pp. 1606-1615.

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Abstract

Lead zirconate titanate (PZT)-based piezoelectric micromachined ultrasonic transducers (PMUTs) for particle manipulation applications were designed, fabricated, characterized, and tested. The PMUTs had a diaphragm diameter of 60 mu m, a resonant frequency of similar to 8 MHz, and an operational bandwidth (BW) of 62.5%. Acoustic pressure output in water was 9.5 kPa at 7.5 mm distance from a PMUT element excited with a unipolar waveform at 5 V-pp. The element consisted of 20 diaphragms connected electrically in parallel. Particle trapping of 4 mu m silica beads was shown to be possible with 5 V-pp unipolar excitation. Trapping of multiple beads by a single element and deterministic control of particles via acoustophoresis without the assistance of microfluidic flow were demonstrated. It was found that the particles move toward diaphragm areas of highest pressure, in agreement with literature and simulations. Unique bead patterns were generated at different driving frequencies and were formed at frequencies up to 60 MHz, much higher than the operational BW. Levitation planes were generated above the 30 MHz driving frequency.

Item Type:	Journal Article
Publication:	IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
Publisher:	IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Additional Information:	Copyright of this article belongs to IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Keywords:	Acoustic tweezing; arrays; microelectromechanical systems (MEMS); particle manipulation; piezoelectric micromachined ultrasonic transducers (PMUTs)
Department/Centre:	Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited:	01 Jan 2020 09:32
Last Modified:	01 Jan 2020 09:32
URI:	http://eprints.iisc.ac.in/id/eprint/63848

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